L. V. Kuz’min et al. / News of the Ural State Mining University, 2024, issue 3(75), pp. 28–35
The relevance of the work is determined by the need to obtain natural high-purity quartz (HPQ) with purity parame- ters that meet the criteria of the semiconductor industry. High-temperature chlorination is the final stage of purifying HPQ from a number of impurity elements (primarily heavy and alkali metals), the low content of which is critical for the semiconductor industry. Due to the high temperatures of this process, the use of aggressive processing gases and complex hardware design, the production cost of the resulting products when using traditional methods is very high.
The purpose of the work is to confirm a new, more economical and easier to industrially use, compared to previous processes, method of high-temperature chlorination of HPQ with achievement of specified quality parameters for the content of iron, copper, chromium, nickel, sodium and potassium.
Methodology. A comparative analysis of open sources, including patent ones, was carried out; a technological scheme for high-temperature chlorination of HPQ in the presence of air has been developed; an experimental chlorination installation was created; a number of experiments were carried out to determine the optimal cleaning regimes for HPQ; analyzes of the initial and finished chlorination products were carried out using the ICP-OES method.
Results. It has been confirmed that the chemical purity of HPQ has been achieved, meeting the requirements of the semiconductor industry, during high-temperature chlorination of HPQ in the presence of air. Samples of products were obtained that are not inferior in purity to the IOTA 4, IOTA 6 grades of Sibelco, the world leader in the HPQ production. Optimal purification modes using the proposed method were selected.
Conclusions. The proposed method for continuous high-temperature chlorination of HPQ in the presence of air en- sures the achievement of the required purity parameters, being more simple in hardware implementation and more economical in terms of capital and production costs in comparison with traditional methods. Can be used in the industrial production of HPQ for the semiconductor industry.
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